SM97A – backside absolute pressure sensor die
The SM97A is a silicon micro-machined, piezoresistive pressure-sensing chip. It replaces the SM98A offering a better sensitivity and very low long-term drift.
The SM97A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials. Therefore, the electronic structures on the front side of the die will not be affected during operation. This results in a durable pressure sensor suitable for challenging applications.
This device is available in a full-scale range of 10 bar and 20 bar absolute (145 and 290 psiA) and is ideal for OEM and high-volume applications. Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system.
They also may be packaged into proprietary, or application specific sensor lines. Backside eutectic metallization is available as an option. Dies are probed, diced, inspected, and shipped on UV release tape or blue tape.
Pressure ranges of SM97A
SM97A: 10 / 20 bar
Features
- Pressure range: 10 bar (145 psiA), 20 bar (290 psiA)
- Support up to 25 times FS Burst Pressure
- Integrated temperature sensor
- Small die (1.2 mm x 1.33 mm)
- Backside entry for harsh environments
- 90 Millivolt output at 5 V
- All-silicon construction
- Backside metal for eutectic bonding is available as an option
- Proprietary design for enhanced proof & burst pressure robustness
Applications
- Pressure regulators and switches
- Compressors and pumps
- Industrial controls
- Heating / ventilation / air conditioning
Downloads
For information on prices and delivery times or if you have any technical questions, please contact info@amsys-sensor.com.