Upon request, AMSYS can offer silicon pressure sensor cells from its contract partners in wafer form for customer-specific high-volume applications. The processing of the silicon sensing elements requires cleanrooms and semiconductor equipment, such as bonders, dispensers, etc.

Product Overview

Piezoresistive Silicon Pressure Sensors (MEMS)

Silicon Pressure Sensor Cells for Differential and Gauge Pressure


Successor of SM30D

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
SM30F-H-ND-005S-0000A 5 PSI 1,34 x 1,34 90 ±0,10
SM30F-H-ND-005S-0000B 5 PSI 1,34 x 1,34 90 ±0,10
SM30F-H-ND-015S-0000A 15 PSI 1,34 x 1,34 90 ±0,10
SM30F-H-ND-015S-0000B 15 PSI 1,34 x 1,34 90 ±0,10
SM30F-H-ND-030S-0000A 30 PSI 1,34 x 1,34 80 ±0,10
SM30F-H-ND-030S-0000B 30 PSI 1,34 x 1,34 80 ±0,10
SM30F-H-ND-080S-0000A 80 PSI 1,34 x 1,34 90 ±0,10
SM30F-H-ND-080S-0000B 80 PSI 1,34 x 1,34 90 ±0,10
SM30F-H-ND-150S-0000A 150 PSI 1,34 x 1,34 80 ±0,10
SM30F-H-ND-150S-0000B 150 PSI 1,34 x 1,34 80 ±0,10

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
SM30G-H-ND-005S-0010A 5 PSI 1,35 x 1,35 90 ±0,10
SM30G-H-ND-015S-0010A 15 PSI 1,35 x 1,35 90 ±0,10
SM30G-H-ND-030S-0010A 30 PSI 1,35 x 1,35 80 ±0,10

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
SM9520A-010M-G-D 0,15 PSI 2,06 x 2,06 45 ±0,10
SM9520A-040M-G-D 0,60 PSI 2,06 x 2,06 90 ±0,10
SM9520A-100M-G-D 1,50 PSI 2,06 x 2,06 95 ±0,10

Silicon Pressure Sensor Cells for Absolute Pressure

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
SM5108E-030-A 30 PSI 0,69 x 0,69 x 0,40 100 ±0,12
SM5108E-060-A 60 PSI 0,69 x 0,69 x 0,40 100 ±0,12
SM5108E-100-A 100 PSI 0,69 x 0,69 x 0,40 100 ±0,12

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
SM97A-H-ND-010B-0000A 10 bar/145 PSIA 1,20 x 1,33 90 ±0,08
SM97A-H-ND-020B-0000A 20 bar/290 PSIA 1,20 x 1,33 90 ±0,08
SM97A-H-ND-050B-0000A 50 bar/725 PSIA 1,20 x 1,33 105 ±0,08
SM97A-H-NV-010B-0001A 10 bar/145 PSIA 1,20 x 1,33 90 ±0,08
SM97A-H-NV-020B-0001A 20 bar/290 PSIA 1,20 x 1,33 90 ±0,08
SM97A-H-NV-050B-0001A 50 bar/725 PSIA 1,20 x 1,33 105 ±0,08

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
MS7212-A2 (not for new designs) 0-12 bar 1,73 x 1,18 150 ±0,5
MS7218-A2 (not for new designs) 0-18 bar 1,73 x 1,18 150 ±0,5

Silicon Pressure Sensor Cells for Differential and Absolute Pressure

Type Measuring range Size (mm) Span@5V (mV) Linearity (%FS)
MS7801-A/D (not for new designs) 0-1 bar 1,98 x 1,84 150 ±0,5
MS7812-A/D (not for new designs) 0-12 bar 2,00 x 1,86 150 ±0,5

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Ceramic Pressure Sensor Cells, Thermally Compensated

Piezoresistive with Flush Membrane for Absolute and Gauge Pressure

Druckmesszelle ME501 / ME505

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME501-0p5 -/R/- 0-0,5 bar Ø 18 x 6,15 1,4-2,4 ±0,4
ME501-001 A/R/S 0-1 bar Ø 18 x 6,17 2,0-3,6 ±0,3
ME501-002 A/R/S 0-2 bar Ø 18 x 6,23 2,0-3,5 ±0,3
ME501-005 A/R/S 0-5 bar Ø 18 x 6,30 2,3-4,0 ±0,2
ME501-010 A/R/S 0-10 bar Ø 18 x 6,35 3,1-5,5 ±0,2
ME501-020 A/R/S 0-20 bar Ø 18 x 6,55 2,4-4,0 ±0,2
ME501-050 A/R/S 0-50 bar Ø 18 x 6,70 4,0-6,0 ±0,2
ME505-100 -/-/S 0-100 bar Ø 18 x 6,70 3,0-4,8 ±0,2
ME505-200 -/-/S 0-200 bar Ø 18 x 7,05 2,5-3,9 ±0,4
ME505-400 -/-/S 0-400 bar Ø 18 x 7,32 3,1-4,8 ±0,5
ME505-600 -/-/S 0-600 bar Ø 18 x 7,55 3,1-4,8 ±0,5
ME505-800 -/-/S 0-800 bar Ø 18 x 8,05 2,0-3,5 ±0,5

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Druckmesszelle ME504

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME504-0p5 -/R/- 0-0,5 bar Ø 18 x 6,15 1,4-2,4 ±0,4
ME504-001 A/R/S 0-1 bar Ø 18 x 6,17 2,0-3,6 ±0,3
ME504-002-A/R/S 0-2 bar Ø 18 x 6,23 2,0-3,5 ±0,3
ME504-005 A/R/S 0-5 bar Ø 18 x 6,30 2,3-4,0 ±0,2
ME504-010 A/R/S 0-10 bar Ø 18 x 6,35 3,4-6,0 ±0,2
ME504-020 A/R/S 0-20 bar Ø 18 x 6,55 2,4-4,0 ±0,2
ME504-050 A/R/S 0-50 bar Ø 18 x 6,70 4,0-6,0 ±0,2
ME504-100 -/-/S 0-100 bar Ø 18 x 6,70 3,1-4,8 ±0,2
ME504-200 -/-/S 0-200 bar Ø 18 x 7,05 2,5-3,9 ±0,4
ME504-400 -/-/S 0-400 bar Ø 18 x 7,32 3,1-4,8 ±0,5
ME504-600 -/-/S 0-600 bar Ø 18 x 7,55 3,1-4,8 ±0,5
ME504-800 -/-/S 0-800 bar Ø 18 x 8,05 2,0-3,5 ±0,5

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Druckmesszelle ME506

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME506-001 A/R/S 0-1 bar Ø 15 x 6,12 1,8-3,6 ±0,3
ME506-002 A/R/S 0-2 bar Ø 15 x 6,17 1,9-3,5 ±0,3
ME506-005 A/R/S 0-5 bar Ø 15x 6,25 2,2-4,0 ±0,2
ME506-010 A/R/S 0-10 bar Ø 15 x 6,30 3,2-5,8 ±0,2
ME506-020 A/R/S 0-20 bar Ø 15 x 6,50 2,2-4,0 ±0,2

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Druckmesszelle ME509

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME509-200 A/R/- 0-200 mbar Ø 32,4 x 5,22 1,3-2,5 ±0,02
ME509-500 A/R/- 0-500 mbar Ø 32,4 x 5,29 1,3-2,5 ±0,02
ME509-101 A/R/- 0-1 bar Ø 32,4 x 5,37 1,3-2,5 ±0,02

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Druckmesszelle ME511

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME511-0p5 -/R/- 0-0,5 bar Ø 18 x 6,15 1,4-2,4 ±0,4
ME511-001 A/R/- 0-1 bar Ø 18 x 6,17 2,0-3,6 ±0,3
ME511-002-A/R/- 0-2 bar Ø 18 x 6,23 2,0-3,5 ±0,3
ME511-005 A/R/- 0-5 bar Ø 18 x 6,30 2,3-4,0 ±0,2
ME511-010 A/R/- 0-10 bar Ø 18 x 6,35 3,1-5,5 ±0,2
ME511-020 A/R/- 0-20 bar Ø 18 x 6,55 2,4-4,0 ±0,2
ME511-050 A/R/- 0-50 bar Ø 18 x 6,70 4,0-6,0 ±0,2
ME511-100 -/-/S 0-100 bar Ø 18 x 6,70 3,0-4,8 ±0,2
ME511-200 -/-/S 0-200 bar Ø 18 x 7,05 2,5-3,9 ±0,4
ME511-400 -/-/S 0-400 bar Ø 18 x 7,32 3,1-4,8 ±0,5
ME511-600 -/-/S 0-600 bar Ø 18 x 7,55 3,1-4,8 ±0,5
ME511-800 -/-/S 0-800 bar Ø 18 x 8,05 2,0-3,5 ±0,5

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

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Piezoresistive, Monolithic for Gauge Pressure

Druckmesszelle ME600

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME600-002 0-2 bar Ø 18 x 6,35 1,8-3,4 ±0,15
ME600-005 0-5 bar Ø 18 x 6,35 2,0-3,5 ±0,15
ME600-010 0-10 bar Ø 18 x 6,35 2,4-4,0 ±0,15
ME600-020 0-20 bar Ø 18 x 6,35 2,8-4,2 ±0,15
ME600-050 0-50 bar Ø 18 x 6,35 2,7-4,0 ±0,25
ME600-100 0-100 bar Ø 18 x 6,35 2,0-3,2 ±0,50
ME600-200 0-200 bar Ø 18 x 6,35 1,8-3,3 ±0,50
ME600-250 0-250 bar Ø 18 x 6,35 1,5-3,0 ±0,50
ME600-400 0-400 bar Ø 18 x 6,35 1,5-3,0 ±0,60
ME600-600 0-600 bar Ø 18 x 6,35 1,5-2,5 ±0,60

Druckmesszelle ME657

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME657-350 0-350 bar Ø 12,85 x 5,0 1,5-3,5 ±0,60

Druckmesszelle ME670

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME670-002 0-2 bar Ø 18 x 6,35 1,8-3,4 ±0,15
ME670-005 0-5 bar Ø 18 x 6,35 2,0-3,5 ±0,15
ME670-010 0-10 bar Ø 18 x 6,35 2,4-4,0 ±0,15
ME670-020 0-20 bar Ø 18 x 6,35 2,8-4,2 ±0,15
ME670-050 0-50 bar Ø 18 x 6,35 2,7-4,0 ±0,25
ME670-100 0-100 bar Ø 18 x 6,35 2,0-3,2 ±0,50
ME670-200 0-200 bar Ø 18 x 6,35 1,8-3,3 ±0,50
ME670-250 0-250 bar Ø 18 x 6,35 1,5-3,0 ±0,50
ME670-400 0-400 bar Ø 18 x 6,35 1,5-3,0 ±0,60

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME910-010 -/R/- 0-10 bar Ø 9 x 4 1,0-1,8 0.40/0.80
ME910-020 -/R/- 0-20 bar Ø 9 x 4 2,0-3,5 0.25/0.50
ME910-050 -/R/- 0-50 bar Ø 9 x 4 2,7-4,7 0.25/0.50
ME910-100 -/R/- 0-100 bar Ø 9 x 4 3,0-5,0 0.25/0.50

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

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Piezoresistive Differential Pressure Sensor Cell

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME800-004 4bar 17 x 4,35 2,0-4,0 ±0,4
ME800-010 10bar 17 x 4,48 2,0-4,0 ±0,4
ME800-016 16bar 17 x 4,60 2,0-4,0 ±0,4
ME800-025 25bar 17 x 4,73 2,0-4,0 ±0,4
ME800-040 40bar 17 x 4,90 2,0-4,0 ±0,4

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Capacitive with Flush Membrane for Absolute and Gauge Pressure

Druckmesszelle ME550

Type Measuring range Size (mm) Sensitivity (mV/V) Linearity (%FS)
ME550-0600 -/R 0-0,06 bar Ø 32,4 x 5,23 0,15-0,45 ±0,2
ME550-1600 -/R 0-0,16 bar Ø 32,4 x 5,28 0,15-0,45 ±0,2
ME550-4000 -/R 0-0,40 bar Ø 32,4 x 5,41 0,15-0,45 ±0,2
ME550-1001 A/R 0-1 bar Ø 32,4 x 5,51 0,15-0,45 ±0,2
ME550-2001 A/R 0-2 bar Ø 32,4 x 5,63 0,15-0,45 ±0,2
ME550-5001 A/R 0-5 bar Ø 32,4 x 5,85 0,15-0,45 ±0,2
ME550-1002 A/R 0-10 bar Ø 32,4 x 5,90 0,15-0,45 ±0,2
ME550-2002 A/R 0-20 bar Ø 32,4 x 6,34 0,15-0,45 ±0,2

A/R/S are pressure options and stand for: Absolut, Relative or Sealed

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The processing of silicon sensing elements requires cleanrooms and semiconductor equipment, such as bonders, dispensers, etc.

You are looking for a sensor solution – we are happy to advise you

AMSYS GmbH & Co. KG

An der Fahrt 4
55124 Mainz
Deutschland
+49 6131 469 875-0
Email: info@amsys.de