Upon request, AMSYS can offer silicon pressure sensor cells from its contract partners in wafer form for customer-specific high-volume applications. The processing of the silicon sensing elements requires cleanrooms and semiconductor equipment, such as bonders, dispensers, etc.
Product Overview
Ceramic Pressure Sensor Cells, Thermally Compensated
Piezoresistive with Flush Membrane for Absolute and Gauge Pressure

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME501-0p5 -/R/- |
0-0,5 bar |
Ø 18 x 6,15 |
1,4-2,4 |
±0,4 |
ME501-001 A/R/S |
0-1 bar |
Ø 18 x 6,17 |
2,0-3,6 |
±0,3 |
ME501-002 A/R/S |
0-2 bar |
Ø 18 x 6,23 |
2,0-3,5 |
±0,3 |
ME501-005 A/R/S |
0-5 bar |
Ø 18 x 6,30 |
2,3-4,0 |
±0,2 |
ME501-010 A/R/S |
0-10 bar |
Ø 18 x 6,35 |
3,1-5,5 |
±0,2 |
ME501-020 A/R/S |
0-20 bar |
Ø 18 x 6,55 |
2,4-4,0 |
±0,2 |
ME501-050 A/R/S |
0-50 bar |
Ø 18 x 6,70 |
4,0-6,0 |
±0,2 |
ME505-100 -/-/S |
0-100 bar |
Ø 18 x 6,70 |
3,0-4,8 |
±0,2 |
ME505-200 -/-/S |
0-200 bar |
Ø 18 x 7,05 |
2,5-3,9 |
±0,4 |
ME505-400 -/-/S |
0-400 bar |
Ø 18 x 7,32 |
3,1-4,8 |
±0,5 |
ME505-600 -/-/S |
0-600 bar |
Ø 18 x 7,55 |
3,1-4,8 |
±0,5 |
ME505-800 -/-/S |
0-800 bar |
Ø 18 x 8,05 |
2,0-3,5 |
±0,5 |
A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME504-0p5 -/R/- |
0-0,5 bar |
Ø 18 x 6,15 |
1,4-2,4 |
±0,4 |
ME504-001 A/R/S |
0-1 bar |
Ø 18 x 6,17 |
2,0-3,6 |
±0,3 |
ME504-002-A/R/S |
0-2 bar |
Ø 18 x 6,23 |
2,0-3,5 |
±0,3 |
ME504-005 A/R/S |
0-5 bar |
Ø 18 x 6,30 |
2,3-4,0 |
±0,2 |
ME504-010 A/R/S |
0-10 bar |
Ø 18 x 6,35 |
3,4-6,0 |
±0,2 |
ME504-020 A/R/S |
0-20 bar |
Ø 18 x 6,55 |
2,4-4,0 |
±0,2 |
ME504-050 A/R/S |
0-50 bar |
Ø 18 x 6,70 |
4,0-6,0 |
±0,2 |
ME504-100 -/-/S |
0-100 bar |
Ø 18 x 6,70 |
3,1-4,8 |
±0,2 |
ME504-200 -/-/S |
0-200 bar |
Ø 18 x 7,05 |
2,5-3,9 |
±0,4 |
ME504-400 -/-/S |
0-400 bar |
Ø 18 x 7,32 |
3,1-4,8 |
±0,5 |
ME504-600 -/-/S |
0-600 bar |
Ø 18 x 7,55 |
3,1-4,8 |
±0,5 |
ME504-800 -/-/S |
0-800 bar |
Ø 18 x 8,05 |
2,0-3,5 |
±0,5 |
A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME506-001 A/R/S |
0-1 bar |
Ø 15 x 6,12 |
1,8-3,6 |
±0,3 |
ME506-002 A/R/S |
0-2 bar |
Ø 15 x 6,17 |
1,9-3,5 |
±0,3 |
ME506-005 A/R/S |
0-5 bar |
Ø 15x 6,25 |
2,2-4,0 |
±0,2 |
ME506-010 A/R/S |
0-10 bar |
Ø 15 x 6,30 |
3,2-5,8 |
±0,2 |
ME506-020 A/R/S |
0-20 bar |
Ø 15 x 6,50 |
2,2-4,0 |
±0,2 |
A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME509-200 A/R/- |
0-200 mbar |
Ø 32,4 x 5,22 |
1,3-2,5 |
±0,02 |
ME509-500 A/R/- |
0-500 mbar |
Ø 32,4 x 5,29 |
1,3-2,5 |
±0,02 |
ME509-101 A/R/- |
0-1 bar |
Ø 32,4 x 5,37 |
1,3-2,5 |
±0,02 |
A/R/S are pressure options and stand for: Absolut, Relative or Sealed

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME511-0p5 -/R/- |
0-0,5 bar |
Ø 18 x 6,15 |
1,4-2,4 |
±0,4 |
ME511-001 A/R/- |
0-1 bar |
Ø 18 x 6,17 |
2,0-3,6 |
±0,3 |
ME511-002-A/R/- |
0-2 bar |
Ø 18 x 6,23 |
2,0-3,5 |
±0,3 |
ME511-005 A/R/- |
0-5 bar |
Ø 18 x 6,30 |
2,3-4,0 |
±0,2 |
ME511-010 A/R/- |
0-10 bar |
Ø 18 x 6,35 |
3,1-5,5 |
±0,2 |
ME511-020 A/R/- |
0-20 bar |
Ø 18 x 6,55 |
2,4-4,0 |
±0,2 |
ME511-050 A/R/- |
0-50 bar |
Ø 18 x 6,70 |
4,0-6,0 |
±0,2 |
ME511-100 -/-/S |
0-100 bar |
Ø 18 x 6,70 |
3,0-4,8 |
±0,2 |
ME511-200 -/-/S |
0-200 bar |
Ø 18 x 7,05 |
2,5-3,9 |
±0,4 |
ME511-400 -/-/S |
0-400 bar |
Ø 18 x 7,32 |
3,1-4,8 |
±0,5 |
ME511-600 -/-/S |
0-600 bar |
Ø 18 x 7,55 |
3,1-4,8 |
±0,5 |
ME511-800 -/-/S |
0-800 bar |
Ø 18 x 8,05 |
2,0-3,5 |
±0,5 |
A/R/S are pressure options and stand for: Absolut, Relative or Sealed
Piezoresistive, Monolithic for Gauge Pressure

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME600-002 |
0-2 bar |
Ø 18 x 6,35 |
1,8-3,4 |
±0,15 |
ME600-005 |
0-5 bar |
Ø 18 x 6,35 |
2,0-3,5 |
±0,15 |
ME600-010 |
0-10 bar |
Ø 18 x 6,35 |
2,4-4,0 |
±0,15 |
ME600-020 |
0-20 bar |
Ø 18 x 6,35 |
2,8-4,2 |
±0,15 |
ME600-050 |
0-50 bar |
Ø 18 x 6,35 |
2,7-4,0 |
±0,25 |
ME600-100 |
0-100 bar |
Ø 18 x 6,35 |
2,0-3,2 |
±0,50 |
ME600-200 |
0-200 bar |
Ø 18 x 6,35 |
1,8-3,3 |
±0,50 |
ME600-250 |
0-250 bar |
Ø 18 x 6,35 |
1,5-3,0 |
±0,50 |
ME600-400 |
0-400 bar |
Ø 18 x 6,35 |
1,5-3,0 |
±0,60 |
ME600-600 |
0-600 bar |
Ø 18 x 6,35 |
1,5-2,5 |
±0,60 |

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME657-350 |
0-350 bar |
Ø 12,85 x 5,0 |
1,5-3,5 |
±0,60 |

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME670-002 |
0-2 bar |
Ø 18 x 6,35 |
1,8-3,4 |
±0,15 |
ME670-005 |
0-5 bar |
Ø 18 x 6,35 |
2,0-3,5 |
±0,15 |
ME670-010 |
0-10 bar |
Ø 18 x 6,35 |
2,4-4,0 |
±0,15 |
ME670-020 |
0-20 bar |
Ø 18 x 6,35 |
2,8-4,2 |
±0,15 |
ME670-050 |
0-50 bar |
Ø 18 x 6,35 |
2,7-4,0 |
±0,25 |
ME670-100 |
0-100 bar |
Ø 18 x 6,35 |
2,0-3,2 |
±0,50 |
ME670-200 |
0-200 bar |
Ø 18 x 6,35 |
1,8-3,3 |
±0,50 |
ME670-250 |
0-250 bar |
Ø 18 x 6,35 |
1,5-3,0 |
±0,50 |
ME670-400 |
0-400 bar |
Ø 18 x 6,35 |
1,5-3,0 |
±0,60 |

A/R/S are pressure options and stand for: Absolut, Relative or Sealed
Piezoresistive Differential Pressure Sensor Cell

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME800-004 |
4bar |
17 x 4,35 |
2,0-4,0 |
±0,4 |
ME800-010 |
10bar |
17 x 4,48 |
2,0-4,0 |
±0,4 |
ME800-016 |
16bar |
17 x 4,60 |
2,0-4,0 |
±0,4 |
ME800-025 |
25bar |
17 x 4,73 |
2,0-4,0 |
±0,4 |
ME800-040 |
40bar |
17 x 4,90 |
2,0-4,0 |
±0,4 |
Capacitive with Flush Membrane for Absolute and Gauge Pressure

Type |
Measuring range |
Size (mm) |
Sensitivity (mV/V) |
Linearity (%FS) |
ME550-0600 -/R |
0-0,06 bar |
Ø 32,4 x 5,23 |
0,15-0,45 |
±0,2 |
ME550-1600 -/R |
0-0,16 bar |
Ø 32,4 x 5,28 |
0,15-0,45 |
±0,2 |
ME550-4000 -/R |
0-0,40 bar |
Ø 32,4 x 5,41 |
0,15-0,45 |
±0,2 |
ME550-1001 A/R |
0-1 bar |
Ø 32,4 x 5,51 |
0,15-0,45 |
±0,2 |
ME550-2001 A/R |
0-2 bar |
Ø 32,4 x 5,63 |
0,15-0,45 |
±0,2 |
ME550-5001 A/R |
0-5 bar |
Ø 32,4 x 5,85 |
0,15-0,45 |
±0,2 |
ME550-1002 A/R |
0-10 bar |
Ø 32,4 x 5,90 |
0,15-0,45 |
±0,2 |
ME550-2002 A/R |
0-20 bar |
Ø 32,4 x 6,34 |
0,15-0,45 |
±0,2 |
A/R/S are pressure options and stand for: Absolut, Relative or Sealed
The processing of silicon sensing elements requires cleanrooms and semiconductor equipment, such as bonders, dispensers, etc.
You are looking for a sensor solution – we are happy to advise you
AMSYS GmbH & Co. KG
An der Fahrt 4
55124 Mainz
Deutschland
+49 6131 469 875-0
Email: info@amsys.de